Researchers fabricate quantum circuit superinductor using commercial CMOS process

Researchers created a nonlinear superinductor inside a silicon integrated circuit made with a commercial CMOS fabrication process, a study in Nature Electronics reports. The component uses titanium nitride to provide very large inductance in a compact circuit while retaining superconducting properties. The work demonstrates a way to fabricate superconducting circuit elements through a commercial semiconductor process. The researchers describe its use in a compact, sensitive sensor for semiconductor spin qubits. Integrating the resonator with multi-gate transistors to demonstrate spin readout well below a microsecond is the next step.