Siemens acquires Canopus AI to bring AI-based metrology to semiconductor manufacturing

Siemens announced the acquisition of Canopus AI, an innovator in computational and AI-driven metrology solutions. The acquisition enables semiconductor manufacturers to achieve new levels of precision and efficiency in wafer and mask inspection processes. This acquisition strengthens Siemens' position in the semiconductor manufacturing ecosystem. It expands its semiconductor design and manufacturing digital thread by integrating additional cutting-edge metrology technologies enhanced with advanced AI capabilities. Canopus AI was founded in 2021 and is based in Grenoble, France. The fast-growing software and AI company is dedicated to revolutionizing wafer and mask metrology and inspection. Tony Hemmelgarn, president and CEO of Siemens Digital Industry Software, said the acquisition combines the computational lithography and manufacturing physics simulation capability in the Calibre portfolio with Canopus AI advanced metrology and inspection technologies. This creates a differentiated end-to-end EDA digital thread that improves the fidelity of printed wafer patterns, accelerates yield ramp and reduces time-to-volume for advanced nodes. Joël Alanis, chief executive officer of Canopus AI, said the company is delighted to join Siemens and bring the power of AI-enabled metrology in the semiconductor industry to a broader audience as part of Siemens EDA community of users. The transaction closed on January 12, 2026.