# Gigaphoton extends neon recycling to ArF chipmaking lasers

_Published Tuesday, October 6, 2026 at 10:21 AM EDT · Infrastructure · Latest · Tier 2 — Notable_

![A worker with a wafer polishing machine. — Primary](https://cdn.mos.cms.futurecdn.net/QTsaWMMDmqTRrNAmFg4JPo-1600-80.jpg)

Gigaphoton has developed an hTGM neon recycling system for its argon fluoride lasers, extending a capability previously offered for krypton fluoride lasers. The company reports a 50% recycling rate for the new system, which recovers gas used in semiconductor lithography.

Gigaphoton claims one unit can reduce annual neon consumption by up to 470 kilotres. Recycling can reduce material costs and dependence on external gas supplies, but the reported recovery rate matches efficiency demonstrated by Cymer's excimer laser recovery system in 2015. Kanken Techno recently demonstrated a system with over 90% recovery and is pursuing certification.

## Sources

- [Tom's Hardware](https://www.tomshardware.com/tech-industry/gigaphoton-debuts-neon-recycling-system-with-claimed-50-percent-recovery-rate-systems-throw-a-lifeline-to-chipmakers-that-utilize-70-percent-of-global-neon-supply-in-duv-lithography)

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Canonical: https://techandbusiness.org/newswire/o4dA_XX5A4ZrN6Ou-3fjrp
Published: 2026-10-06T14:21:53.423Z
Story chronology: 2026-10-06T13:20:00.000Z
Retrieved: 2026-10-06T16:59:52.497Z
Publisher: Tech & Business (techandbusiness.org)