ZNTC completes development stage for 130nm lithography prototype
Image: Primary Russia's Zelenograd Nanotechnology Center has completed the third research and development stage of a lithography prototype designed to pattern 200-mm wafers for 130nm chip production, CNews reports. The machine is undergoing internal engineering and acceptance testing.
Documents seen by CNews identify Belarus-based Planar as the developer of the lithography system and manufacturer of its mechanical assemblies. ZNTC handled overall system development and process work. The prototype still needs design validation and qualification by chipmakers before it can support volume production, a process expected to take years.
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